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of defects intrinsic HTCVD in SI SiC crystals, as the. such Si-vacancy, previously has been [4]. reported the In compound semiconductor,. SiC Provided is a process
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Verlag GmbH & Co. KGaA, Weinheim. www.advmat.de. Adv. Mater. 2005, 17, 1480±1483. The presence of intrinsic defects